Greene, Tweed offers the broadest line of seals for chip-fabrication equipment. Our products developed for use in wet and dry processes, including metalization, chemical vapor deposition (CVD), etching, stripping, cleaning, ashing, ion implant, rapid thermal processing (RTP) and chemical mechanical planarization (CMP), provide customers with the ultimate sealing solution for their application requirements.
RECOMMENDED MATERIALS
COMPARISON OF SEAL PROPERTIES
CHEMICAL COMPATIBILITY GUIDE
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